{"id":2059,"date":"2026-05-22T05:57:23","date_gmt":"2026-05-22T05:57:23","guid":{"rendered":"https:\/\/www.thermofisher.com\/blog\/accelerating-science-in-china\/?p=2059"},"modified":"2026-05-22T05:57:24","modified_gmt":"2026-05-22T05:57:24","slug":"3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/www.thermofisher.cn\/blog\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/","title":{"rendered":"3D NAND\u7ed3\u6784 &#8211; 3D\u91cf\u6d4b\u6280\u672f &#8211; \u534a\u5bfc\u4f53\u5236\u9020"},"content":{"rendered":"<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><a href=\"https:\/\/www.thermofisher.cn\/cn\/zh\/home\/promo\/electron-microscopy\/resource-library.html?icid=cn-blog-msd\" target=\"_blank\" rel=\"noopener\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"176\" src=\"http:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/Blog-\u7535\u955cbanner-1-MSD-1024x176.jpg\" alt=\"\" class=\"wp-image-2095\" srcset=\"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/Blog-\u7535\u955cbanner-1-MSD-1024x176.jpg 1024w, https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/Blog-\u7535\u955cbanner-1-MSD-300x52.jpg 300w, https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/Blog-\u7535\u955cbanner-1-MSD-768x132.jpg 768w, https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/Blog-\u7535\u955cbanner-1-MSD-1536x264.jpg 1536w, https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/Blog-\u7535\u955cbanner-1-MSD-2048x352.jpg 2048w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/a><\/figure>\n<\/div>\n\n\n<h2 class=\"wp-block-heading\" id=\"h-\u7528\u4e8e3d-nand\u7ed3\u6784\u5236\u9020\u7684\u5148\u8fdb\u91cf\u6d4b\u6280\u672f\"><strong>\u7528\u4e8e3D NAND\u7ed3\u6784\u5236\u9020\u7684\u5148\u8fdb\u91cf\u6d4b\u6280\u672f<\/strong><\/h2>\n\n\n\n<p><em><em>\u5728\u8fd9\u7bc7\u535a\u5ba2\u6587\u7ae0\u4e2d\uff0c\u4e86\u89e3\u73b0\u4ee33D NAND\u7ed3\u6784\u7684\u8bbe\u8ba1\u5982\u4f55\u5e26\u6765\u72ec\u7279\u7684\u534a\u5bfc\u4f53\u5236\u9020\u6311\u6218\uff0c\u4ee5\u53ca\u53ef\u7528\u7684\u5148\u8fdb3D\u91cf\u6d4b\u89e3\u51b3\u65b9\u6848\u5982\u4f55\u514b\u670d\u8fd9\u4e9b\u6311\u6218\u3002<\/em><\/em><\/p>\n\n\n\n<p><em>\u66f4\u591a\u8d44\u6e90\uff1a<\/em><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><a href=\"https:\/\/ter.li\/ux5f09\"><u><em>\u534a\u5bfc\u4f533D NAND\u767d\u76ae\u4e66<\/em><\/u><\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/admin.acceleratingscience.com\/semiconductors\/3d-nand-flash-technology\/\"><em>3D NAND\u95ea\u5b58\u6280\u672f\u535a\u5ba2\u6587<\/em><\/a><\/li>\n<\/ul>\n\n\n\n<p>\u65b0\u4e00\u4ee33D NAND\u5668\u4ef6\u5728\u5782\u76f4\u65b9\u5411\u4e0a\u62e5\u6709\u66f4\u591a\u5806\u53e0\u5b58\u50a8\u5355\u5143\u5c42\uff0c\u7ed3\u6784\u53d8\u5f97\u66f4\u9ad8\u3002\u540c\u65f6\uff0c\u5b58\u50a8\u5355\u5143\u4e4b\u95f4\u7684\u95f4\u8ddd\u5728\u6c34\u5e73\u65b9\u5411\u4e0a\u6301\u7eed\u7f29\u5c0f\u3002\u8fd9\u79cd\u4e09\u7ef4\u7f29\u653e\u4ea7\u751f\u4e86\u9ad8\u4e14\u9ad8\u7eb5\u6a2a\u6bd4\uff08HAR\uff09\u76843D NAND\u7ed3\u6784\uff0c\u4ece\u800c\u5e26\u6765\u4e86\u72ec\u7279\u7684\u5236\u9020\u548c\u91cf\u6d4b\u6311\u6218\u3002<\/p>\n\n\n<div class=\"wp-block-image wp-image-272 size-full\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"http:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/uploads\/sites\/23\/2023\/02\/3D-NAND-Figure-1_2400x1200.jpg\" alt=\"3D NAND structure manufacturing challenges\" class=\"wp-image-272\" \/><figcaption class=\"wp-element-caption\">\u56fe1. 3D NAND\u7ed3\u6784\u5236\u9020\u6bcf\u4e00\u6b65\u9762\u4e34\u7684\u6311\u6218<\/figcaption><\/figure>\n<\/div>\n\n\n<h2 class=\"wp-block-heading\" id=\"h-\u8bc6\u522b3d-nand\u7ed3\u6784\u5236\u9020\u95ee\u9898\"><strong>\u8bc6\u522b3D NAND\u7ed3\u6784\u5236\u9020\u95ee\u9898<\/strong><strong><\/strong><\/h2>\n\n\n\n<p>\u5728\u5236\u9020\u65b9\u9762\uff0c3D NAND\u5668\u4ef6\u9700\u8981\u7ecf\u8fc7\u591a\u4e2a\u5173\u952e\u6b65\u9aa4\uff0c\u5305\u62ec\u901a\u9053\u5b54\u523b\u8680\u3001\u5355\u5143\u6c89\u79ef\u3001\u82af\u7247\u5806\u53e0\u3001\u72ed\u7f1d\u548c\u9636\u68af\u7ed3\u6784\u5f62\u6210\u7b49\u3002\u5728\u6bcf\u4e00\u6b65\uff0c\u5236\u9020\u8fc7\u7a0b\u90fd\u8981\u6c42\u9ad8\u5ea6\u7684\u7cbe\u786e\u6027\u548c\u5de5\u827a\u63a7\u5236\u3002\u4f8b\u5982\uff0c\u901a\u9053\u5b54\u523b\u8680\u662f\u4e00\u4e2a\u975e\u5e38\u4e25\u82db\u7684\u8fc7\u7a0b\uff0c\u5bb9\u6613\u53d7\u5230\u5982\u56fe1\u6240\u793a\u7684\u5f2f\u66f2\u3001\u503e\u659c\u3001\u626d\u66f2\u548c\u8680\u523b\u4e0d\u5b8c\u5168\u7b49\u4f17\u6240\u5468\u77e5\u7684\u95ee\u9898\u5f71\u54cd\u3002\u5f53\u8fd9\u4e9b\u95ee\u9898\u53d1\u751f\u65f6\uff0c\u4f1a\u5bfc\u81f4\u67f1\u72b6\u7ed3\u6784\u63a5\u89e6\uff0c\u4ece\u800c\u5f15\u53d1\u6bd4\u7279\u6545\u969c\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"h-\u89e3\u51b33d-\u91cf\u6d4b-\u6570\u636e\u76f8\u5173\u95ee\u9898\"><strong>\u89e3\u51b33D<\/strong><strong>\u91cf\u6d4b<\/strong><strong>\u6570\u636e\u76f8\u5173\u95ee\u9898<\/strong><strong><\/strong><\/h2>\n\n\n\n<p>\u5728\u91cf\u6d4b\u65b9\u9762\uff0c\u7531\u4e8e\u96be\u4ee5\u83b7\u53d63D\u91cf\u6d4b\u6570\u636e\uff0c\u6676\u5706\u5382\u5728\u7406\u89e3\u8fd9\u4e9b\u9ad8\u7eb5\u6a2a\u6bd4\uff08HAR\uff09\u7ed3\u6784\u7684\u884c\u4e3a\u548c\u6027\u80fd\u65f6\u9762\u4e34\u6311\u6218\u3002\u76ee\u524d\u7684\u89e3\u51b3\u65b9\u6848\uff0c\u5982\u5149\u5b66CD\uff08OCD\uff09\u548cCD-SAXS\uff0c\u5e76\u4e0d\u80fd\u76f4\u63a5\u6d4b\u91cf\u9690\u85cf\u57283D\u7ed3\u6784\u5185\u90e8\u7684\u5c0f\u578b\u5173\u952e\u5c3a\u5bf8\uff08CD\uff09\u3002\u5176\u4e3b\u8981\u9650\u5236\u662f\u65e0\u6cd5\u63d0\u4f9b\u76f4\u63a5\u7684\u91cf\u6d4b\u6570\u636e\u6765\u51c6\u786e\u5206\u6790\u5c40\u90e8CD\uff0c\u4f8b\u5982\u901a\u9053\u5b54\u4e4b\u95f4\u7684\u53d8\u5316\u3002\u8fd9\u4e9b\u4fe1\u606f\u5bf9\u4e8e\u5de5\u827a\u5f00\u53d1\u548c\u5feb\u901f\u826f\u7387\u63d0\u5347\u5c24\u4e3a\u91cd\u8981\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u7528\u4e8e\u89e3\u51b33D NAND\u7ed3\u6784\u6311\u6218\u7684SEM\u4e0eTEM<\/strong><strong>\u91cf\u6d4b<\/strong><strong>\u5de5\u4f5c\u6d41\u7a0b<\/strong><strong><\/strong><\/h2>\n\n\n\n<p>\u5e78\u8fd0\u7684\u662f\uff0c\u53ef\u4ee5\u901a\u8fc7\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u548c\u900f\u5c04\u7535\u5b50\u663e\u5fae\u955c\uff08TEM\uff09\u83b7\u53d63D NAND\u7ed3\u6784\u7684\u6570\u636e\u3002\u5728\u6bcf\u4e2a\u5de5\u827a\u6b65\u9aa4\u4e2d\uff0c\u57fa\u4e8eSEM\u548cTEM\u7684\u5de5\u4f5c\u6d41\u7a0b\u80fd\u591f\u4ece\u5b58\u50a8\u5806\u6808\u9876\u90e8\u5230\u5e95\u90e8\uff0c\u4ee5\u4e9a\u7eb3\u7c73\u6216\u4e9a\u57c3\u7ea7\u5206\u8fa8\u7387\u76f4\u63a5\u6d4b\u91cf\u9690\u85cf\u7684\u5173\u952e\u5c3a\u5bf8\u3002\u8fd9\u4e9b\u6570\u636e\u53ef\u7528\u4e8e\u521b\u5efa\u9ad8\u7cbe\u5ea6\u53c2\u8003\u6570\u636e\uff0c\u5bf9\u4e8e\u5de5\u827a\u4f18\u5316\u4e0e\u63a7\u5236\u81f3\u5173\u91cd\u8981\u3002\u901a\u8fc7\u5bf9\u6676\u5706\u591a\u4e2a\u533a\u57df\u8fdb\u884c\u91c7\u6837\uff0c\u6bcf\u4e2a\u4f4d\u7f6e\u53ef\u4ee5\u6355\u83b7\u6570\u5343\u4e2a\u5173\u952e\u5c3a\u5bf8\uff0c\u4ece\u800c\u5b9e\u73b0\u5bf9ONO\u5c42\u539a\u5ea6\u3001\u5f2f\u66f2CD\u3001\u626d\u66f2\u3001\u503e\u659c\u53ca\u9525\u5ea6\u7b49\u5173\u952e\u5de5\u827a\u6027\u80fd\u6307\u6807\u8fdb\u884c\u5b8c\u6574\u7edf\u8ba1\u5206\u6790\u3002<\/p>\n\n\n<div class=\"wp-block-image wp-image-274 size-full\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"http:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/uploads\/sites\/23\/2023\/02\/3D-NAND-Figure-2_2400x1200.jpg\" alt=\"SEM and TEM based metrology for each NAND process step\" class=\"wp-image-274\" \/><figcaption class=\"wp-element-caption\">\u56fe2. \u57fa\u4e8eSEM\u4e0eTEM\u7684\u91cf\u6d4b\u65b9\u6cd5\u5bf9\u5e94\u56fe1\u4e2d\u6bcf\u4e2a\u5de5\u827a\u6b65\u9aa4<\/figcaption><\/figure>\n<\/div>\n\n\n<p>\u6839\u636e\u4e0d\u540c\u7684\u5de5\u827a\u6b65\u9aa4\u53ca\u6240\u9700\u7cbe\u5ea6\uff0c\u6676\u5706\u5382\u53ef\u4ee5\u9009\u62e9\u57fa\u4e8eSEM\u6216TEM\u7684\u91cf\u6d4b\u5de5\u4f5c\u6d41\u7a0b\uff0c\u4f46\u901a\u5e38\u4f1a\u7ed3\u5408\u4e24\u8005\uff0c\u4ee5\u83b7\u5f97\u6700\u5168\u9762\u7684\u7ed3\u679c\u5e76\u89e3\u51b3\u6240\u6709\u5de5\u827a\u6b65\u9aa4\u4e2d\u7684\u5173\u952e\u6311\u6218\uff0c\u5982\u56fe2\u6240\u793a\u3002<\/p>\n\n\n\n<p>\u867d\u7136\u57fa\u4e8eTEM\u7684\u91cf\u6d4b\u5177\u6709\u6700\u9ad8\u7cbe\u5ea6\uff0c\u4f46\u5bf9\u4e8e\u90e8\u5206\u5173\u952e\u5de5\u827a\u6b65\u9aa4\uff0c\u901a\u8fc7\u914d\u5907\u5728\u7ebf\u805a\u7126\u79bb\u5b50\u675f\uff08FIB\uff09\u529f\u80fd\u8f85\u52a9\u4e0b\u4f7f\u7528SEM\u91cf\u6d4b\uff0c\u53ef\u66f4\u5feb\u5730\u83b7\u5f97\u5927\u91cf3D\u91cf\u6d4b\u6570\u636e\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"h-channel-hole-etch-challenges-a-sem-metrology-case-study\"><strong>Channel hole etch challenges: a SEM metrology case study<\/strong><\/h2>\n\n\n\n<p><strong>\u901a\u9053\u5b54\u8680\u523b\u6311\u6218\uff1aSEM<\/strong><strong>\u91cf\u6d4b<\/strong><strong>\u6848\u4f8b\u7814\u7a76<\/strong><strong><\/strong><\/p>\n\n\n\n<p>\u7406\u89e3\u5e76\u63a7\u5236\u9ad8\u7eb5\u6a2a\u6bd4\u8680\u523b\u8fc7\u7a0b\u4f9d\u8d56\u4e8e\u4ece3D NAND\u7ed3\u6784\u9876\u90e8\u5230\u5e95\u90e8\u83b7\u5f97\u8d2f\u7a7f\u5806\u6808\u7684\u91cf\u6d4b\u6570\u636e\u3002\u4e00\u79cd\u57fa\u4e8e\u6c19\u7b49\u79bb\u5b50\u4f53FIB\u53bb\u5c42\u6280\u672f\u7684SEM\u91cf\u6d4b\u5de5\u4f5c\u6d41\u7a0b\uff0c\u901a\u8fc7\u9010\u5c42\u53bb\u9664\u6750\u6599\u5e76\u83b7\u53d6SEM\u56fe\u50cf\u8fdb\u884c\u91cf\u6d4b\u6d4b\u91cf\uff0c\u6709\u6548\u89e3\u51b3\u4e86\u8fd9\u4e00\u6311\u6218\u3002\u5728\u672c\u4f8b\u4e2d\uff0c\u5bf9\u4e00\u6b3e\u5546\u7528\u53cc\u5c423D NAND\u5668\u4ef6\u4e0a\u768430\u5fae\u7c73\u00d730\u5fae\u7c73\u5b58\u50a8\u9635\u5217\u533a\u57df\u8fdb\u884c\u4e86\u76ee\u6807\u5b9a\u4f4d\uff08\u89c1\u56fe3\uff09\uff0c\u5e76\u5bf9\u9ad8\u7eb5\u6a2a\u6bd4\u7ed3\u6784\u8fdb\u884c\u4e86\u53bb\u5c42\u5904\u7406\u3002<\/p>\n\n\n\n<p>\u4e00\u79cd\u4e13\u6709\u7684\u6c14\u4f53\u5316\u5b66\u7269\u8d28\u88ab\u6ce8\u5165\u5230\u611f\u5174\u8da3\u533a\u57df\uff0c\u4ee5\u786e\u4fdd\u6bcf\u4e00\u5c42\u7684\u5e73\u6574\u5ea6\u548c\u5149\u6ed1\u5ea6\uff0c\u76f4\u5230\u76ee\u6807\u533a\u57df\u88ab\u53bb\u5c42\u81f3\u5b58\u50a8\u5806\u6808\u5e95\u90e8\u3002\u5728\u6bcf\u4e00\u5c42\uff0c\u90fd\u4f1a\u81ea\u52a8\u91c7\u96c6\u9ad8\u5206\u8fa8\u7387\u7684\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u56fe\u50cf\uff0c\u4e3a\u6574\u4e2a\u4f53\u79ef\u63d0\u4f9b\u91cf\u6d4b\u6e90\u56fe\u50cf\u3002<\/p>\n\n\n\n<p>\u968f\u540e\u4f7f\u7528 Thermo Fisher Metrology \u5bf9 SEM \u56fe\u50cf\u8fdb\u884c\u5206\u6790\uff0c<a href=\"https:\/\/ter.li\/zizwb9\"><u>Avizo \u8f6f\u4ef6<\/u><\/a>\u4ee5\u63d0\u53d6\u7528\u4e8e\u4e09\u7ef4\u5256\u9762\u548c\u91cd\u5efa\u7684\u5173\u952e\u53c2\u6570\u3002<\/p>\n\n\n<div class=\"wp-block-image wp-image-280\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"http:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/uploads\/sites\/23\/2023\/02\/3D-NAND-Figure-3_2400x1200.jpg\" alt=\"Targeted memory array on a 3D NAND device\" class=\"wp-image-280\" \/><figcaption class=\"wp-element-caption\">\u56fe 3. \u5546\u7528 3D NAND \u5668\u4ef6\u4e0a\u7684\u76ee\u6807\u5b58\u50a8\u9635\u5217<\/figcaption><\/figure>\n<\/div>\n\n\n<p>\u6570\u636e\u5982\u56fe 3 \u6240\u793a\uff0c\u901a\u8fc7\u5206\u6790 SEM \u56fe\u50cf\u4e0a\u76ee\u6807\u533a\u57df\u5185\u7ea6 170 \u4e2a\u5b58\u50a8\u5b54\u5728\u5168\u7403\u5750\u6807\u4e2d\u7684\u6700\u8fd1\u90bb\u53ca\u4e2d\u5fc3\uff0c\u5e76\u8de8\u8d8a 144 \u5c42\u83b7\u5f97\u3002<\/p>\n\n\n\n<p>\u6570\u636e\u663e\u793a\uff0c\u5e73\u5747\u503e\u659c\u5ea6\u968f\u7740\u5806\u6808\u589e\u52a0\u800c\u63d0\u5347\uff0c\u5e76\u4e14\u5c40\u90e8\u503e\u659c\u5ea6\u5728\u56fe 3 \u7684\u5de6\u53f3\u5bb9\u5668\u4e4b\u95f4\u6709\u6240\u4e0d\u540c\u3002\u6b64\u5916\uff0c\u901a\u8fc7\u663e\u793a\u9876\u90e8\u5404\u5b58\u50a8\u5b54\u6807\u51c6\u5dee\u8f83\u5c0f\uff0c\u76f8\u6bd4\u4e8e\u6bcf\u5c42\u5e95\u90e8\uff0c\u8680\u523b\u5de5\u827a\u5728\u5806\u6808\u9876\u90e8\u66f4\u52a0\u4e00\u81f4\uff0c\u540c\u65f6\u8be5\u6280\u672f\u8fd8\u6355\u6349\u5230\u4e86\u5c42\u63a5\u53e3\u5904\u7ed3\u70b9\u53e0\u52a0\u7684\u4e0d\u5339\u914d\uff08\u7ea6\u4e3a17\u7eb3\u7c73\uff09\u3002<\/p>\n\n\n<div class=\"wp-block-image wp-image-279 size-full\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"http:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/uploads\/sites\/23\/2023\/02\/3D-NAND-Figure-4_2400x1200.jpg\" alt=\"Highly localized CD variations on a 3D NAND device\" class=\"wp-image-279\" \/><figcaption class=\"wp-element-caption\">\u56fe 4. \u5546\u7528 3D NAND \u5668\u4ef6\u4e0a\u7684\u9ad8\u5ea6\u5c40\u90e8\u5316 CD \u6ce2\u52a8<\/figcaption><\/figure>\n<\/div>\n\n\n<p>\u91c7\u7528\u8fd9\u79cd\u65b9\u6cd5\uff0c\u6676\u5706\u5382\u53ef\u4ee5\u76f4\u63a5\u5bf9\u6bcf\u4e00\u5c42\u7684\u5b58\u50a8\u5355\u5143\u8fdb\u884c\u6d4b\u91cf\uff0c\u4e3a\u5176\u4ed6\u91cf\u6d4b\u65b9\u6848\u63d0\u4f9b\u9ad8\u7cbe\u5ea6\u53c2\u8003\u6570\u636e\uff0c\u540c\u65f6\u83b7\u5f97\u5176\u4ed6\u91cf\u6d4b\u65b9\u6848\u65e0\u6cd5\u63d0\u4f9b\u7684\u9ad8\u5ea6\u5c40\u90e8\u5316 CD \u6ce2\u52a8\u6d4b\u91cf\u7ed3\u679c\u3002<\/p>\n\n\n\n<p>\u8be5\u65b9\u6cd5\u8bba\u4e3a\u5806\u6808\u5185\u53c2\u6570\u63d0\u4f9b\u4e86\u6e05\u6670\u5b8c\u6574\u7684\u7406\u89e3\uff0c\u7528\u4e8e\u6307\u5bfc\u5de5\u827a\u8d8b\u52bf\u548c\u5206\u5e03\u5206\u6790\u3002\u5168\u81ea\u52a8\u503e\u659c\u53f0\u5b9e\u73b0\u4e86 FIB \u53bb\u5c42\u4e0e SEM \u6210\u50cf\u65e0\u7f1d\u5de5\u4f5c\u6d41\u7a0b\uff0c\u4ee5\u6700\u9ad8\u541e\u5410\u91cf\u83b7\u53d6\u4e09\u7ef4\u4f53\u79ef\u6570\u636e\u3002SEM \u8fd8\u5141\u8bb8\u7528\u6237\u5728\u5806\u6808\u4e2d\u4efb\u610f\u5c42\u505c\u7559\uff0c\u5b9e\u73b0\u9488\u5bf9\u6027\u91c7\u6837\u4e0e\u6bd4\u8f83\uff0c\u6839\u636e\u9700\u6c42\u63d0\u4f9b\u66f4\u591a\u91c7\u6837\u3002<\/p>\n\n\n\n<p><strong>\u4e86\u89e3\u66f4\u591a\u5173\u4e8e\u5728Thermo Scientific Helios 5 PXL\u4e0a\u8fdb\u884c\u7684SEM\u53bb\u5c42\u548c\u91cf\u6d4b\u5de5\u4f5c\u6d41\u7a0b\u7684\u4fe1\u606f\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684<\/strong><a href=\"https:\/\/ter.li\/uonsnj\"><u>2022\u5e74FCMN\u5927\u4f1a\u62a5\u544a<\/u><\/a>*<strong>\u4ee5\u53ca\u6211\u4eec\u7684<\/strong><a href=\"https:\/\/ter.li\/ux5f09\"><u>\u534a\u5bfc\u4f533D NAND\u767d\u76ae\u4e66<\/u><\/a>\u3002<\/p>\n\n\n\n<p>\u8d5b\u9ed8\u98de\u4e16\u5c14\u79d1\u6280\u662f\u5168\u7403\u9886\u5148\u7684<a href=\"https:\/\/ter.li\/ejystu\"><u>\u91cf\u6d4b<\/u><u>\u89e3\u51b3\u65b9\u6848\u4f9b\u5e94\u5546\uff0c\u4e13\u6ce8\u4e8e3D NAND\u5f00\u53d1\u4e0e\u5236\u9020\uff0c\u5305\u62ec\u57fa\u4e8eSEM\u548cTEM\u7684\u5de5\u4f5c\u6d41\u7a0b\u89e3\u51b3\u65b9\u6848\u3002<\/u><\/a>\u4fe1\u606f\u56fe\uff1a\u8d5b\u9ed8\u98de3D NAND\u91cf\u6d4b\u89e3\u51b3\u65b9\u6848<\/p>\n\n\n<div class=\"wp-block-image wp-image-276 size-full\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"http:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/uploads\/sites\/23\/2023\/02\/3D-NAND-Figure-5_2400x1200.jpg\" alt=\"Infographic: Thermo Fisher Metrology Solutions for 3D NAND structure analysis\" class=\"wp-image-276\" \/><figcaption class=\"wp-element-caption\">*\u8bba\u6587\u53d1\u8868\u4e8eFCMN 2022\uff1a\u4e0e\u53bb\u5c42\u76f8\u5173\u76843D\u5b58\u50a8\u5b54\u5256\u6790\uff0c\u5408\u8457\u8005\uff1a<\/figcaption><\/figure>\n<\/div>\n\n\n<p>*Paper presented at FCMN 2022: 3D Profiling Memory Holes with Delayering by co-authors: <span data-scheme-color=\"@222222,1,\" data-usefontface=\"false\" data-contrast=\"none\">Zhenxin Zhong,&nbsp;Minkook&nbsp;Kim,&nbsp;Umesh Adiga,&nbsp;Arun Sundar, Melissa Mullen,&nbsp;<\/span><span data-scheme-color=\"@222222,1,\" data-usefontface=\"false\" data-contrast=\"none\">Binxing<\/span><span data-scheme-color=\"@222222,1,\" data-usefontface=\"false\" data-contrast=\"none\">&nbsp;Wu,&nbsp;Ruixin&nbsp;Zhang,<\/span>\u200b <span data-scheme-color=\"@222222,1,\" data-usefontface=\"false\" data-contrast=\"none\">Sean Zumwalt, David Tien<\/span><\/p>\n\n\n\n<p>\/\/ <em><em>\u4e0e\u8d5b\u9ed8\u98de\u4e16\u5c14\u79d1\u6280\u9ad8\u7ea7\u5e02\u573a\u5f00\u53d1\u7ecf\u7406\u987e\u6653\u6c40\u5408\u4f5c\u64b0\u5199\u3002<\/em><\/em><\/p>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u7528\u4e8e3D NAND\u7ed3\u6784\u5236\u9020\u7684\u5148\u8fdb\u91cf\u6d4b\u6280\u672f \u5728\u8fd9\u7bc7\u535a\u5ba2\u6587\u7ae0\u4e2d\uff0c\u4e86\u89e3\u73b0\u4ee33D NAND\u7ed3\u6784\u7684\u8bbe\u8ba1\u5982\u4f55\u5e26\u6765\u72ec\u7279\u7684\u534a\u5bfc<\/p>\n","protected":false},"author":1852,"featured_media":2061,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_monsterinsights_skip_tracking":false,"_genesis_hide_title":false,"_genesis_hide_breadcrumbs":false,"_genesis_hide_singular_image":false,"_genesis_hide_footer_widgets":false,"_genesis_custom_body_class":"","_genesis_custom_post_class":"","_genesis_layout":"","footnotes":""},"categories":[51,7],"tags":[207],"division":[6],"class_list":{"0":"post-2059","1":"post","2":"type-post","3":"status-publish","4":"format-standard","5":"has-post-thumbnail","7":"category-51","8":"category-7","9":"tag-3d-nand","10":"division-msd","11":"entry"},"_selected_authors":[1377],"_selected_reviewers":[],"acf":[],"yoast_head":"<!-- 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class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.thermofisher.com\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/\"},\"author\":{\"name\":\"Calvin Ye\",\"@id\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/#\\\/schema\\\/person\\\/8e7a640047c10da2b7107498ddb447d6\"},\"headline\":\"3D NAND\u7ed3\u6784 &#8211; 3D\u91cf\u6d4b\u6280\u672f &#8211; \u534a\u5bfc\u4f53\u5236\u9020\",\"datePublished\":\"2026-05-22T05:57:23+00:00\",\"dateModified\":\"2026-05-22T05:57:24+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/www.thermofisher.com\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/\"},\"wordCount\":141,\"commentCount\":0,\"image\":{\"@id\":\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/wp-content\\\/uploads\\\/sites\\\/28\\\/2026\\\/05\\\/3D-NAND-Figure-3.jpg\",\"keywords\":[\"3D NAND\"],\"articleSection\":[\"\u6750\u6599\u79d1\u5b66\",\"\u7535\u5b50\u663e\u5fae\u955c\"],\"inLanguage\":\"zh-Hans\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/www.thermofisher.com\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/\",\"url\":\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/\",\"name\":\"3D NAND\u7ed3\u6784 - 3D\u91cf\u6d4b\u6280\u672f - \u534a\u5bfc\u4f53\u5236\u9020 - \u8d5b\u9ed8\u98de\u4e2d\u6587\u535a\u5ba2\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/wp-content\\\/uploads\\\/sites\\\/28\\\/2026\\\/05\\\/3D-NAND-Figure-3.jpg\",\"datePublished\":\"2026-05-22T05:57:23+00:00\",\"dateModified\":\"2026-05-22T05:57:24+00:00\",\"author\":{\"@id\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/#\\\/schema\\\/person\\\/8e7a640047c10da2b7107498ddb447d6\"},\"description\":\"\u73b0\u4ee33D NAND\u7ed3\u6784\u8bbe\u8ba1\u5e26\u6765\u4e86\u72ec\u7279\u7684\u534a\u5bfc\u4f53\u5236\u9020\u6311\u6218\u3002\u5148\u8fdb\u76843D\u8ba1\u91cf\u89e3\u51b3\u65b9\u6848\u6709\u52a9\u4e8e\u514b\u670d\u8fd9\u4e9b\u6311\u6218\u3002\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/#breadcrumb\"},\"inLanguage\":\"zh-Hans\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/#primaryimage\",\"url\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/wp-content\\\/uploads\\\/sites\\\/28\\\/2026\\\/05\\\/3D-NAND-Figure-3.jpg\",\"contentUrl\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/wp-content\\\/uploads\\\/sites\\\/28\\\/2026\\\/05\\\/3D-NAND-Figure-3.jpg\",\"width\":669,\"height\":350},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/www.thermofisher.cn\\\/blog\\\/accelerating-science-in-china\\\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"3D NAND\u7ed3\u6784 &#8211; 3D\u91cf\u6d4b\u6280\u672f &#8211; \u534a\u5bfc\u4f53\u5236\u9020\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/#website\",\"url\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/\",\"name\":\"\u8d5b\u9ed8\u98de\u4e2d\u6587\u535a\u5ba2\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"zh-Hans\"},{\"@type\":\"Person\",\"@id\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/accelerating-science-in-china\\\/#\\\/schema\\\/person\\\/8e7a640047c10da2b7107498ddb447d6\",\"name\":\"Calvin Ye\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/bbe4236bccb5fcea6db0797643cf62d5613a642669442510a90ed606595e6a27?s=96&d=mm&r=g\",\"url\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/bbe4236bccb5fcea6db0797643cf62d5613a642669442510a90ed606595e6a27?s=96&d=mm&r=g\",\"contentUrl\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/bbe4236bccb5fcea6db0797643cf62d5613a642669442510a90ed606595e6a27?s=96&d=mm&r=g\",\"caption\":\"Calvin Ye\"},\"url\":\"https:\\\/\\\/admin.acceleratingscience.com\\\/author\\\/calvin-yethermofisher-com\\\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"3D NAND\u7ed3\u6784 - 3D\u91cf\u6d4b\u6280\u672f - \u534a\u5bfc\u4f53\u5236\u9020 - \u8d5b\u9ed8\u98de\u4e2d\u6587\u535a\u5ba2","description":"\u73b0\u4ee33D NAND\u7ed3\u6784\u8bbe\u8ba1\u5e26\u6765\u4e86\u72ec\u7279\u7684\u534a\u5bfc\u4f53\u5236\u9020\u6311\u6218\u3002\u5148\u8fdb\u76843D\u8ba1\u91cf\u89e3\u51b3\u65b9\u6848\u6709\u52a9\u4e8e\u514b\u670d\u8fd9\u4e9b\u6311\u6218\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/","og_locale":"zh_CN","og_type":"article","og_title":"3D NAND\u7ed3\u6784 - 3D\u91cf\u6d4b\u6280\u672f - \u534a\u5bfc\u4f53\u5236\u9020","og_description":"\u73b0\u4ee33D NAND\u7ed3\u6784\u8bbe\u8ba1\u5e26\u6765\u4e86\u72ec\u7279\u7684\u534a\u5bfc\u4f53\u5236\u9020\u6311\u6218\u3002\u5148\u8fdb\u76843D\u8ba1\u91cf\u89e3\u51b3\u65b9\u6848\u6709\u52a9\u4e8e\u514b\u670d\u8fd9\u4e9b\u6311\u6218\u3002","og_url":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/","og_site_name":"\u8d5b\u9ed8\u98de\u4e2d\u6587\u535a\u5ba2","article_publisher":"https:\/\/www.facebook.com\/thermofisher","article_published_time":"2026-05-22T05:57:23+00:00","article_modified_time":"2026-05-22T05:57:24+00:00","og_image":[{"width":669,"height":350,"url":"http:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/3D-NAND-Figure-3.jpg","type":"image\/jpeg"}],"author":"Calvin Ye","twitter_card":"summary_large_image","twitter_creator":"@thermofisher","twitter_site":"@thermofisher","twitter_misc":{"Written by":"Calvin Ye","Est. reading time":"3 \u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/#article","isPartOf":{"@id":"https:\/\/www.thermofisher.com\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/"},"author":{"name":"Calvin Ye","@id":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/#\/schema\/person\/8e7a640047c10da2b7107498ddb447d6"},"headline":"3D NAND\u7ed3\u6784 &#8211; 3D\u91cf\u6d4b\u6280\u672f &#8211; \u534a\u5bfc\u4f53\u5236\u9020","datePublished":"2026-05-22T05:57:23+00:00","dateModified":"2026-05-22T05:57:24+00:00","mainEntityOfPage":{"@id":"https:\/\/www.thermofisher.com\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/"},"wordCount":141,"commentCount":0,"image":{"@id":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/#primaryimage"},"thumbnailUrl":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/3D-NAND-Figure-3.jpg","keywords":["3D NAND"],"articleSection":["\u6750\u6599\u79d1\u5b66","\u7535\u5b50\u663e\u5fae\u955c"],"inLanguage":"zh-Hans","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/www.thermofisher.com\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/","url":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/","name":"3D NAND\u7ed3\u6784 - 3D\u91cf\u6d4b\u6280\u672f - \u534a\u5bfc\u4f53\u5236\u9020 - \u8d5b\u9ed8\u98de\u4e2d\u6587\u535a\u5ba2","isPartOf":{"@id":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/#primaryimage"},"image":{"@id":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/#primaryimage"},"thumbnailUrl":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/3D-NAND-Figure-3.jpg","datePublished":"2026-05-22T05:57:23+00:00","dateModified":"2026-05-22T05:57:24+00:00","author":{"@id":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/#\/schema\/person\/8e7a640047c10da2b7107498ddb447d6"},"description":"\u73b0\u4ee33D NAND\u7ed3\u6784\u8bbe\u8ba1\u5e26\u6765\u4e86\u72ec\u7279\u7684\u534a\u5bfc\u4f53\u5236\u9020\u6311\u6218\u3002\u5148\u8fdb\u76843D\u8ba1\u91cf\u89e3\u51b3\u65b9\u6848\u6709\u52a9\u4e8e\u514b\u670d\u8fd9\u4e9b\u6311\u6218\u3002","breadcrumb":{"@id":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/#breadcrumb"},"inLanguage":"zh-Hans","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/"]}]},{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/#primaryimage","url":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/3D-NAND-Figure-3.jpg","contentUrl":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/3D-NAND-Figure-3.jpg","width":669,"height":350},{"@type":"BreadcrumbList","@id":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/"},{"@type":"ListItem","position":2,"name":"3D NAND\u7ed3\u6784 &#8211; 3D\u91cf\u6d4b\u6280\u672f &#8211; \u534a\u5bfc\u4f53\u5236\u9020"}]},{"@type":"WebSite","@id":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/#website","url":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/","name":"\u8d5b\u9ed8\u98de\u4e2d\u6587\u535a\u5ba2","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"zh-Hans"},{"@type":"Person","@id":"https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/#\/schema\/person\/8e7a640047c10da2b7107498ddb447d6","name":"Calvin Ye","image":{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/secure.gravatar.com\/avatar\/bbe4236bccb5fcea6db0797643cf62d5613a642669442510a90ed606595e6a27?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/bbe4236bccb5fcea6db0797643cf62d5613a642669442510a90ed606595e6a27?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/bbe4236bccb5fcea6db0797643cf62d5613a642669442510a90ed606595e6a27?s=96&d=mm&r=g","caption":"Calvin Ye"},"url":"https:\/\/admin.acceleratingscience.com\/author\/calvin-yethermofisher-com\/"}]}},"taxonomy_info":{"category":[{"value":51,"label":"\u6750\u6599\u79d1\u5b66"},{"value":7,"label":"\u7535\u5b50\u663e\u5fae\u955c"}],"post_tag":[{"value":207,"label":"3D NAND"}],"division":[{"value":6,"label":"MSD"}]},"featured_image_src_large":["https:\/\/admin.acceleratingscience.com\/accelerating-science-in-china\/wp-content\/uploads\/sites\/28\/2026\/05\/3D-NAND-Figure-3.jpg",669,350,false],"author_info":{"display_name":"Calvin Ye","author_link":"https:\/\/admin.acceleratingscience.com\/author\/calvin-yethermofisher-com\/"},"comment_info":1,"category_info":[{"term_id":51,"name":"\u6750\u6599\u79d1\u5b66","slug":"%e6%9d%90%e6%96%99%e7%a7%91%e5%ad%a6","term_group":0,"term_taxonomy_id":51,"taxonomy":"category","description":"","parent":0,"count":30,"filter":"raw","meta":[],"cat_ID":51,"category_count":30,"category_description":"","cat_name":"\u6750\u6599\u79d1\u5b66","category_nicename":"%e6%9d%90%e6%96%99%e7%a7%91%e5%ad%a6","category_parent":0},{"term_id":7,"name":"\u7535\u5b50\u663e\u5fae\u955c","slug":"%e7%94%b5%e5%ad%90%e6%98%be%e5%be%ae%e9%95%9c","term_group":0,"term_taxonomy_id":7,"taxonomy":"category","description":"","parent":0,"count":28,"filter":"raw","meta":[],"cat_ID":7,"category_count":28,"category_description":"","cat_name":"\u7535\u5b50\u663e\u5fae\u955c","category_nicename":"%e7%94%b5%e5%ad%90%e6%98%be%e5%be%ae%e9%95%9c","category_parent":0}],"tag_info":[{"term_id":207,"name":"3D NAND","slug":"3d-nand","term_group":0,"term_taxonomy_id":207,"taxonomy":"post_tag","description":"","parent":0,"count":2,"filter":"raw","meta":[]}],"_links":{"self":[{"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/posts\/2059","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/users\/1852"}],"replies":[{"embeddable":true,"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/comments?post=2059"}],"version-history":[{"count":0,"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/posts\/2059\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/media\/2061"}],"wp:attachment":[{"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/media?parent=2059"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/categories?post=2059"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/tags?post=2059"},{"taxonomy":"division","embeddable":true,"href":"https:\/\/www.thermofisher.cn\/blog\/accelerating-science-in-china\/wp-json\/wp\/v2\/division?post=2059"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}