{"id":646,"date":"2026-03-05T07:03:14","date_gmt":"2026-03-05T07:03:14","guid":{"rendered":"https:\/\/www.thermofisher.com\/blog\/accelerating-science-in-china\/?p=646"},"modified":"2026-03-09T05:35:17","modified_gmt":"2026-03-09T05:35:17","slug":"how-gas-purity-protects-yield-quality-and-uptime-in-semiconductor-fabs","status":"publish","type":"post","link":"https:\/\/www.thermofisher.cn\/blog\/how-gas-purity-protects-yield-quality-and-uptime-in-semiconductor-fabs\/","title":{"rendered":"\u8d85\u9ad8\u7eaf\u5ea6\u6c14\u4f53\u5982\u4f55\u4fdd\u62a4\u534a\u5bfc\u4f53\u5de5\u5382\u7684\u4ea7\u91cf\u3001\u8d28\u91cf\u548c\u6b63\u5e38\u8fd0\u884c"},"content":{"rendered":"\n<p>\u968f\u7740\u5168\u7403\u5bf9\u66f4\u667a\u80fd\u3001\u66f4\u5feb\u901f\u3001\u66f4\u5f3a\u5927\u7535\u5b50\u4ea7\u54c1\u7684\u9700\u6c42\u4e0d\u65ad\u589e\u957f\uff0c<a 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id=\"h-\u65e0\u5f62\u5a01\u80c1-\u5de8\u5927\u5f71\u54cd\"><strong><strong>\u65e0\u5f62\u5a01\u80c1\uff0c\u5de8\u5927\u5f71\u54cd<\/strong><\/strong><\/h2>\n\n\n\n<p>\u73b0\u4ee3\u82af\u7247\u662f\u7531\u5c42\u5c42\u6750\u6599\u7ec4\u6210\u7684\u590d\u6742\u7cfb\u7edf\uff0c\u901a\u8fc7\u539f\u5b50\u7ea7\u7cbe\u5ea6\u8fdb\u884c\u8680\u523b\u548c\u6c89\u79ef\u3002\u5728\u8fd9\u79cd\u6781\u5176\u654f\u611f\u7684\u73af\u5883\u4e0b\uff0c\u5373\u4f7f\u5de5\u827a\u6c14\u4f53\u4e2d\u5b58\u5728\u5fae\u5c0f\u6742\u8d28\u2014\u2014\u5982\u6c34\u3001\u7532\u70f7\u3001\u6c2e\u6c14\u3001\u6c22\u6c14\u3001\u6c27\u6c14\u3001\u6c29\u6c14\u6216\u4e8c\u6c27\u5316\u78b3\u2014\u2014\u90fd\u53ef\u80fd\u5bfc\u81f4\u6602\u8d35\u7684\u751f\u4ea7\u4e2d\u65ad\u3002<\/p>\n\n\n\n<p>\u8fd9\u4e9b\u6c61\u67d3\u7269\u8089\u773c\u65e0\u6cd5\u5bdf\u89c9\uff0c\u4f46\u5b83\u4eec\u5e26\u6765\u7684\u5f71\u54cd\u5374\u7edd\u975e\u5fae\u4e0d\u8db3\u9053\u3002\u4ec5\u4ec5\u5fae\u91cf\u5c31\u80fd\u7834\u574f\u6676\u5706\u5b8c\u6574\u6027\uff0c\u5f15\u53d1\u7ed3\u6784\u5f31\u70b9\u3001\u7535\u6c14\u4e0d\u4e00\u81f4\u751a\u81f3\u8bbe\u5907\u5f7b\u5e95\u5931\u6548\u3002\u7ed3\u679c\u5c31\u662f\uff1a\u6676\u5706\u62a5\u5e9f\u3001\u751f\u4ea7\u7ebf\u505c\u6ede\uff0c\u4ee5\u53ca\u6570\u767e\u4e07\u7f8e\u5143\u635f\u5931<strong>.<\/strong><\/p>\n\n\n\n<p>\u5386\u53f2\u4e0a\uff0c\u884c\u4e1a\u4f9d\u8d56\u6c14\u76f8\u8272\u8c31\u548c\u70ed\u8131\u9644\u7b49\u5de5\u5177\u6765\u76d1\u6d4b\u8fd9\u4e9b\u6c14\u4f53\u3002\u867d\u7136\u5728\u67d0\u4e9b\u5e94\u7528\u573a\u666f\u4e0b\u4ecd\u7136\u6709\u4ef7\u503c\uff0c\u4f46\u5b83\u4eec\u5df2\u65e0\u6cd5\u6ee1\u8db3\u5f53\u4eca\u5236\u9020\u6d41\u7a0b\u5bf9\u901f\u5ea6\u3001\u7075\u654f\u5ea6\u548c\u68c0\u6d4b\u5e7f\u5ea6\u7684\u9700\u6c42\u3002<\/p>\n\n\n\n<h2 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href=\"https:\/\/www.thermofisher.cn\/cn\/zh\/home\/semiconductors.html?icid=CAD_blog_materials_2025July\">\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020<\/a>\u3002<\/p>\n\n\n\n<p>API-MS\u80fd\u591f\u5b9e\u73b0\u5bf9\u6c14\u4f53\u7eaf\u5ea6\u7684\u8fde\u7eed\u5b9e\u65f6\u76d1\u6d4b\uff0c\u5176\u68c0\u6d4b\u80fd\u529b\u53ef\u8fbe\u4e07\u4ebf\u5206\u4e4b\u4e00\uff08ppt\uff09\u7ea7\u522b\u3002\u8fd9\u79cd\u7075\u654f\u5ea6\u5bf9\u4e8e\u5728\u6c61\u67d3\u7269\u5f71\u54cd\u6676\u5706\u751f\u4ea7\u4e4b\u524d\u53ca\u65f6\u53d1\u73b0\u81f3\u5173\u91cd\u8981\u3002<\/p>\n\n\n\n<p>\u4e0e\u4f20\u7edf\u65b9\u6cd5\u4e0d\u540c\uff0cAPI-MS\u5177\u5907\uff1a<\/p>\n\n\n\n<ul 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href=\"https:\/\/www.thermofisher.cn\/cn\/zh\/home\/industrial\/manufacturing-processing\/process-analytical-systems-equipment\/process-mass-spectrometers\/ultra-high-purity-electronic-gas-analyzer-semiconductor.html?icid=CAD_blog_materials_2025July\">\u6c14\u4f53\u5206\u6790\u4eea<\/a>\u5229\u7528\u5927\u6c14\u538b\u7535\u79bb\u8d28\u8c31\uff08API-MS\uff09\u80fd\u591f\u6301\u7eed\u68c0\u6d4b\u5230\u4e07\u4ebf\u5206\u4e4b\u4e00\uff08ppt\uff09\u7ea7\u522b\u7684\u5173\u952e\u6742\u8d28\u2014\u2014\u5e2e\u52a9\u6676\u5706\u5382\u6ee1\u8db3\u65e5\u76ca\u4e25\u683c\u7684\u5de5\u827a\u63a7\u5236\u8981\u6c42\u3002<\/p>\n\n\n\n<p>(\u5bf9\u4e8e\u6709\u5174\u8da3\u8fdb\u4e00\u6b65\u63a2\u7d22\u8be5\u65b9\u6cd5\u7684\u4eba\u58eb\uff0c\u6709\u4e00\u4efd\u5e94\u7528\u8bf4\u660e\uff0c\u6982\u8ff0\u4e86\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u8d85\u9ad8\u7eaf\u5ea6\uff08UHP\uff09\u6c14\u4f53\u6742\u8d28\u68c0\u6d4b\u7b56\u7565\u3002\u9605\u8bfb\u5e94\u7528\u8bf4\u660e\uff1a<a 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id=\"h-\u901a\u8fc7\u96c6\u6210\u5de5\u5177\u63d0\u5347\u8d28\u91cf\u63a7\u5236\"><strong><strong>\u901a\u8fc7\u96c6\u6210\u5de5\u5177\u63d0\u5347\u8d28\u91cf\u63a7\u5236<\/strong><\/strong><\/h2>\n\n\n\n<p>\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u8d28\u91cf\u63a7\u5236\u5e76\u4e0d\u662f\u4f9d\u8d56\u5355\u4e00\u5de5\u5177\u6216\u67d0\u4e2a\u65f6\u523b\u2014\u2014\u5b83\u662f\u4e00\u9879\u6301\u7eed\u7684\u3001\u7aef\u5230\u7aef\u7684\u6218\u7565\u3002\u867d\u7136API-MS\u89e3\u51b3\u4e86\u5316\u5b66\u7eaf\u5ea6\u7684\u95ee\u9898\uff0c\u4f46\u5b83\u4e0e\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u7ed3\u5408\u4f7f\u7528\uff0c\u4e5f\u80fd\u5f3a\u6709\u529b\u5730\u4fdd\u969c\u7269\u7406\u5b8c\u6574\u6027\u3002<\/p>\n\n\n\n<p>SEM\u5de5\u5177\u63d0\u4f9b\u7eb3\u7c73\u7ea7\u6210\u50cf\uff0c\u80fd\u591f\u5728\u4e0d\u635f\u4f24\u7cbe\u5bc6\u7ec4\u4ef6\u7684\u60c5\u51b5\u4e0b\u8bc6\u522b\u539f\u5b50\u7ea7\u522b\u7684\u7ed3\u6784\u7f3a\u9677\u6216\u6c61\u67d3\u3002\u5f53\u4e0eAPI-MS\u63d0\u4f9b\u7684\u5316\u5b66\u5206\u6790\u76f8\u7ed3\u5408\u65f6\uff0c\u4e24\u8005\u5171\u540c\u6784\u5efa\u51fa\u5168\u9762\u7684\u68c0\u6d4b\u89c6\u89d2\u65e2\u4e86\u89e3\u6676\u5706\u5185\u90e8\u6210\u5206\uff0c\u4e5f\u80fd\u53d1\u73b0\u6f5c\u5728\u98ce\u9669\u3002<\/p>\n\n\n\n<p>\u8fd9\u79cd\u53cc\u91cd\u65b9\u6cd5\u5bf9\u4e8e\u62e5\u67093D\u7ed3\u6784\u3001\u66f4\u5c0f\u8282\u70b9\u548c\u66f4\u8584\u5c42\u6b21\u7684\u65b0\u4e00\u4ee3\u82af\u7247\u5c24\u4e3a\u5173\u952e\uff0c\u56e0\u4e3a\u6750\u6599\u548c\u7ed3\u6784\u5b8c\u6574\u6027\u6b63\u9762\u4e34\u524d\u6240\u672a\u6709\u7684\u6311\u6218\u3002<\/p>\n\n\n\n<h2 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