With Thermo Scientific Phenom 3D Reconstruction Software, the Phenom Desktop SEM systems are able to generate three-dimensional images and submicrometer roughness measurements.
3D imaging helps to interpret sample characteristics and makes images understandable for a larger group of users. It is often difficult to identify features such as dents, scratches and burrs with flat, 2D images. Additionally, measuring the average roughness (Ra) and roughness height (Rz) is critical for controlling and understanding production processes. Phenom 3D Reconstruction Software enables you to transform your 2D observations into 3D representations. By using SEM imaging for data collection, a much better resolution can be achieved than with traditional (indirect) methods.
3D imaging helps to interpret sample characteristics and makes images understandable for a larger group of users.
Phenom 3D Reconstruction Software is available as part of Thermo Scientific Phenom ProSuite Software, which
contains multiple Phenom desktop SEM specific applications.
No stage tilt
With "shape from shading" technology, no stage tilt is required.
Automated roughness measurements
Field of view
Part of ProSuite Software