SURF-CAL™ Particle Size Standards

Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.

• Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
• By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
• You can also assess the performance of your SSIS at critical stages in the manufacturing process.
• All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 10⁸ particles per mL.

Note:

Products PD1100 and smaller are also available at 10¹⁰ particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.