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Scios 3 FIB-SEM

A versatile FIB-SEM for high-throughput performance with advanced automation

The Thermo Scientific Scios 3 FIB-SEM is a versatile, high-performance instrument for materials science, engineering, semiconductor failure analysis, and quality control labs. With ultra-high-resolution SEM imaging, reliable TEM sample preparation, automated cross-sectioning, and advanced workflows, it can handle a wide variety of sample types—including magnetic or non-conductive materials—without compromising image quality or throughput. The Scios 3 FIB-SEM combines ease of use with automation, making it a powerful tool for academic and industrial environments that demand flexibility and consistency.

Webinar: Introducing the Scios 3 FIB-SEM

Automated workflows and analytic capabilities for efficient sample preparation and analysis.

Scios 3 FIB-SEM features

Automated cross-section preparation and analysis

The Scios 3 FIB-SEM automatically prepares and images cross sections, enabling high-quality subsurface characterization with precise targeting. It streamlines workflows, reduces user intervention, and ensures consistent, high-quality results in high-throughput environments.

High-throughput analytical 3D characterization

Thermo Scientific Auto Slice & View 5 Software automates serial sectioning for high-throughput 3D analysis. Seamless integration enables multi-modal data collection. Combine it with Thermo Scientific Avizo Software for data reconstruction, segmentation, and multi-channel visualization.

Automated, high-quality, site-specific (S)TEM sample preparation

Preparing high-quality, site-specific (S)TEM samples with the Scios 3 FIB-SEM is fast and easy. When combined with Thermo Scientific AutoTEM 5 Software, it fully automates the workflow to deliver consistent, high-throughput sample preparation for a wide range of materials and devices.

High-resolution SEM imaging

The Scios 3 FIB-SEM features field-free electron optics for ultra-high-resolution imaging of challenging materials like magnetic or non-conducting samples, providing clear, accurate visual data for detailed examination and root cause analysis.

Designed for ease of use

The Scios 3 FIB-SEM features an intuitive user interface that simplifies operation and reduces the learning curve. This design improvement increases productivity by helping you quickly master the system and focus on your objectives.

Automation that makes a difference

From automating applications for targeted workflows to keeping your tool in the best shape with on-the-fly image adjustments for accurate results, automation helps maximize utilization of your system and bridge skill sets across users.

For Research Use Only. Not for use in diagnostic procedures.