Scios 3 FIB-SEM Features

The innovative NICol electron column provides the foundation of the Scios 3 FIB-SEM's high-resolution imaging and detection capabilities. It offers excellent nanoscale details, using a wide range of working conditions, whether operating at 30 keV in STEM mode to access structural information or at lower energies to obtain charge-free, detailed information from the surface. Fast, accurate, and reproducible results are obtained thanks to unique NICol column design with full auto alignments.

Prepare and image multiple cross-sections in a single workflow with less operator intervention and higher throughput. Particularly valuable for routine failure analysis in semiconductor, industrial materials development, and academic research labs handling diverse materials.

The Scios 3 FIB-SEM introduces a dedicated application for fully automated cross-section analysis, enabling high-quality subsurface characterization with precise targeting of the region of interest. This solution is designed to deliver high-quality results in high-throughput environments.

The Scios 3 FIB-SEM routinely delivers high-quality, site-specific lamellae for accurate and reproducible TEM or STEM analyses. Automation reduces operator time and ensures consistent results.

The latest technological innovations of the Scios 3 FIB-SEM, in combination with the comprehensive, intuitive Thermo Scientific AutoTEM 5 Software and our application expertise, allow for fast and easy preparation of site- specific HR-S/TEM samples for a wide range of materials.

Fully automation serial sectioning enabled by Auto Slice & View Software and combined with nanometer-scale 3D reconstructions to help characterize subsurface structures quickly and reproducibly.

Perform advanced in situ sample heating experiments, freeze samples to low temperatures, or investigate samples in their natural state using low vacuum conditions.  Flexible for diverse materials research environments.

The Scios 3 FIB-SEM can be equipped with the μHeater holder, a fully integrated, extremely fast, MEMS-based heating stage for sample characterization in closer to real-world working conditions. The 110 mm stage tilts up to 90˚ and provides a long, eucentric working distance for great flexibility. The Scios 3S FIB-SEM has an optional low-vacuum mode and easily accommodates a wide range of sample types and data collection. It combines expanded deposition and etching capabilities with the Thermo Scientific MultiChem Gas Delivery System, enhanced sample flexibility, and control to create a versatile high-performance FIB-SEM instrument, all backed by our expert application and service support.

The intuitive user interface features multiple automation functions that simplify operation of the microscope and reduce the learning curve. Tools like auto focus, dynamic contrast-brightness adjustments, automated eucentric height finder increase and many more productivity by enabling you to quickly master the system and focus on your research objectives. The user-friendly interface helps ensure that even those with minimal experience can operate the system efficiently, making it accessible to a broader range of users. It offers user guidance, making it easy for novice users to be productive quickly. In addition, features such as “undo” and “redo” encourage greater experimentation with peace of mind. This ease of use is crucial for maximizing the system's potential and achieving optimal results.