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FIB-SEM techniques for sample preparation and analysis
Thermo Scientific FIB-SEMs empower a variety of advanced techniques that can help you prepare samples and gather data. Whether your goal is to create an ultra-thin TEM lamella or to reconstruct a 3D volume of your sample’s interior, our FIB-SEMs, including the Thermo Scientific Scios 3 FIB-SEM, provide the tools and automation to get it done efficiently.
Techniques
| (S)TEM sample preparation | The Scios 3 FIB-SEM reliably prepares routine (S)TEM lamella from a variety of materials. Thermo Scientific AutoTEM Software allows even novice FIB users to prepare high-quality samples with consistency and ease. |
| 3D structural analysis | The Scios 3 FIB-SEM is well suited for standard 3D tomography and slice-and-view workflows. Its advanced SEM in-lens detector system obtains high-contrast images of surface features, device structures, and materials composition. Even higher resolution can be achieved with the Thermo Scientific Helios 5 FIB-SEM. With Thermo Scientific Auto Slice & View Software and Thermo Scientific Avizo Software, the Scios 3 FIB-SEM can be used to image and reconstruct features in 3D. |
| 2D cross sectioning | The Scios 3 FIB-SEM prepares excellent cross sections on a wide variety of materials and semiconductor technologies. The field-free SEM column technology works even with bulk magnetic samples. Optional Auto Cross Section Software boosts productivity, delivering statistical relevance to the acquired data and making it ideally suited for industrial environments and failure analysis labs. |
| Cryo workflow | The Scios 3 FIB-SEM makes it easy to analyze beam-sensitive and frozen samples. Configuration with a cryo stage and Cryo EasyLift allows you to create cross sections and perform cryo TEM lift-out while preserving fine structures within your sample. |
| APT tip preparation | The Scios 3 FIB-SEM reliably prepares APT tips for a broad range of materials. |
For Research Use Only. Not for use in diagnostic procedures.