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Scios 3 FIB-SEM Software and Accessories

Integrated tools for automation, detection, and advanced workflows

Specialized accessories and software modules adapt the Thermo Scientific Scios 3 FIB-SEM to your application, whether it’s working at cryogenic temperatures, lifting out delicate samples, delivering complex chemistries, or running advanced automated workflows. Each is designed to integrate seamlessly, improving efficiency, precision, and versatility.

Software solutions

Thermo Scientific™ Auto Cross Section (AXS) Software streamlines cross-section preparation and SEM imaging through intelligent automation. Designed for Thermo Scientific focused ion beam scanning electron microscopes (FIB-SEMs), AXS Software enables high-throughput, multi-site, multi-smaple cross-sectioning and imaging with exceptional precision and reproducibility.

 

By automating FIB milling and SEM imaging workflows, AXS Software reveals subsurface features that are otherwise inaccessible—such as layer structures, interfaces, defects, and inclusions—providing critical insights into material composition, structural integrity, and failure mechanisms.

AutoTEM Software

Thermo Scientific AutoTEM Software automates in situ and ex situ TEM lamella preparation, enabling multi-site, unattended operation. It reduces preparation time and ensures consistent quality across samples.

Auto Slice & View Software

Thermo Scientific Auto Slice & View Software acquires high-fidelity 3D datasets through automated sequential milling followed by SEM imaging or EDS/EBSD mapping. It can help you reveal hidden defects or reconstruct complex microstructures.

Avizo Software

Thermo Scientific Avizo Software delivers visualization and image processing techniques. With Avizo Software you can reconstruct stacks of slices into volumes and visualize them in 3D, segment and measure features of interest in your data with AI and traditional tools, register imaging and spectroscopy data, access multi-channel visualization, and more.

AutoScript Software

Thermo Scientific AutoScript Software offers Python-based scripting to help you create custom automation for faster, more accurate, and unattended operation. It supports various tasks such as imaging, patterning, and data analysis, enhancing reproducibility and efficiency in scientific workflows.

Accessories

MultiChem Gas Injection System

The Thermo Scientific MultiChem Gas Injection System allows you to configure up to six different chemistries in one instrument. It provides in situ deposition and etching capabilities for protective coating deposition, circuit edits, and enhanced material removal.

EasyLift Nanomanipulator

The Thermo Scientific EasyLife Nanomanipulator precisely and reliably transfers micro- and nanoscale samples in situ. It streamlines lift-out workflows for TEM, APT sample preparation, and other analyses.

Cryo Stage

The cryo stage keeps samples at cryogenic temperatures to prevent structural changes or contamination, protecting beam-sensitive or volatile materials.

TOF-SIMS

Time-of-flight secondary-ion mass spectrometry (ToF-SIMS) offers high sensitivity and nanometer spatial resolution for detailed elemental mapping, revealing internal structures and defects in various materials. When combined with automated sequential milling (enabled by Auto Slice & View Software), Thermo Scientific Avizo Software can provide comprehensive 3D reconstruction, data registration, and multi-channel visualization, providing valuable insights into sample composition and integrity.

CleanConnect Sample Transfer System

The Thermo Scientific CleanConnect Sample Transfer System enhances FIB-SEM workflows by enabling seamless sample transfer under inert gas or vacuum, preserving sample integrity and preventing contamination. The CleanConnect System supports fast transfers, making it ideally suited for applications requiring quick imaging and high sample integrity.

In situ heating stages

Designed for the most challenging electron microscopy tasks in materials science, the Scios 3 FIB-SEM can be equipped with the μHeater holder—a fully integrated, extremely fast, MEMS-based heating stage—or a high-vacuum heating stage to characterize bulk samples in closer to real-world working conditions.

For Research Use Only. Not for use in diagnostic procedures.