Accurate analysis of gallium-based compound semiconductor devices

Ga-Free TEM Sample Preparation for High-Confidence S/TEM Analysis

For power and compound semiconductor applications, sample preparation quality can directly affect analytical outcomes.

 

Ga-free TEM sample preparation with the Thermo Scientific Helios Hydra PFIB-SEM minimizes ion-induced damage and eliminates gallium contamination, producing clean, structurally intact lamellae ready for advanced analysis.

 

Why Ga-free matters

Traditional Ga-based preparation can introduce:

  • Gallium implantation

  • Amorphous damage layers

  • Artifacts that obscure true device structures

 

The Helios Hydra PFIB-SEM removes these limitations by enabling Ga-free lamellae, resulting in S/TEM analysis with:

  • Reliable compositional results from EDS, EELS and DPC

  • High confidence in nanoscale measurements

  • Atomic interfacial integrity in HR-STEM

 

With high-quality lamellae, downstream imaging and analysis become more straightforward. A stable, easy-to-use (S)TEM platform such as the Thermo Scientific Talos F200E (S)TEM can deliver the required structural and compositional insight without the added complexity of probe correction.

 

The Helios Hydra PFIB-SEM also supports cross-section analysis and 3D characterization for power and compound semiconductor applications, delivering flexibility across sample preparation workflows.

 

Download our new application note to learn how this optimized workflow enables advanced compound semiconductor analysis with reliable atomic-resolution insights.

Complete the form below to download the App Note


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