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赛默飞公司以高精尖FT-IR为核心，将量测技术和EFEM集成出新一代“Nicolet iG50 Series”半导体材料表征自动化量测设备，满足用户量测需求。使用 Thermo Scientific Nicolet iG50 Wafer Analytical System 晶圆量测设备，您可大幅度地提高在线量测效率并快速采集高品质光谱数据。直观的用户界面使任意技术水平的用户可快速进行产线的量测，SECS/GEM 标准协议带能为用户及时传递设备的空闲、采集或警报状态。光源、激光器和干涉仪享有长年质保，让您未来使用放心无忧。
产品介绍
Nicolet iG50
Nicolet iG50自动化晶圆分析系统集Nicolet FTIR核心光谱技术优势，专为半导体晶圆片的自动化分析而设计。产品基于功能强大的Nicolet iG50工业化光谱分析平台，能完美的满足Wafer生产过程质量控制、产品研发的测试应用需求。
iG50-Tabletop System
尺寸mm1000w x 1165d x 1590h
iG50-200 6/8-inch Wafer Measurement System 6/8寸晶圆量测
尺寸mm 1400w x 1150d x 1710h
尺寸mm 1470w x 1530d x 1830h
尺寸mm 1985w x 1500d x 1830h
iG50-300 12-inch Wafer Measurement System 12寸晶圆量测
尺寸mm 1470w x 1486d x 1830h
尺寸mm 1470w x 1530d x 1830h
尺寸mm 1985w x 1500d x 1830h
iG50-Oi Ingot Measurement System 硅Oi量测
尺寸mm 4800w x 1515d x 1822h
PC机架尺寸mm 660w x 600d x 480h
应用领域
- Epitaxial Thickness
- Carbon & Oxygen in Silicon
- Boron & Phosphorus in BPSG or PSG Films
- Hydrogen in Silicon Nitride
- Fluorine in Silicon Oxside Films
- Multi Background Option
- GEM/SECS Host Communication
- Share File Host Communication
- Double Station Sorting Support
- Four Station Sorting Support
- Six Station Sorting Support
- Hydrogen in Silicon Software
- SiC Epitaxial Thickness Support
可定制方案
- 200mm wafer adapter for FOUP system
- Tag Reader for FOUP & SMIF system
- Keyence: BL600
- Omron: V640E84
- E84 OHT Support for OHT COM module
- Safety Light Curtain for OHT
- Sensing lonizer System
- Water ID Reader Module
- Optical FFU (Fan Filter Unit)
- Share File Host Communication