FIB-SEM | Accuros FIB-SEM | Thermo Fisher Scientific

Accuros FIB-SEM: Designed for integration into HDD manufacturing

Precise cross-sectional SEM metrology is essential for process development and manufacturing in the hard disk drive (HDD) industry, especially with the emergence of heat-assisted magnetic recording (HAMR). The Thermo Scientiﬁc Accuros FIB-SEM provides fast, fully automated, and precise metrology directly in the fab to support high-volume production readiness. With in-line wafer processing, fab host connectivity, and tool matching, the Accuros FIB-SEM is designed for seamless integration into HDD production environments.

The Accuros FIB-SEM streamlines HDD wafer metrology with high-speed, high-precision measurements powered by the Osprey FIB and Elstar UC+ electron columns. For additional process control, Slice & Image enables automated, high-resolution cross-sectional imaging through buried devices. These images can then be inspected individually to identify any process deviations within the device, enhancing productivity.

Key features of the Accuros FIB-SEM

High throughput for HDD fabs

With dual load ports and fab host connectivity, the Accuros FIB-SEM is designed for HDD fabs, delivering in-line metrology data for faster process decisions and tighter control.

Precise cut placement

Achieve innovative cut placement using Osprey FIB technology.

Engineered for precision, the Accuros FIB-SEM delivers exceptional cross- sectional targeting.

Precise metrology

Ultra-high-resolution SEM imaging and software innovations for accuracy without compromise.

Accuros FIB-SEM delivers repeatable metrology performance, helping enable conﬁdent process control.

Datasheets

Accuros FIB-SEM datasheet

The Accuros FIB-SEM is designed for rapid, high-throughput, cross-section SEM metrology with hard disk drive wafers. Featuring precise cut placement, accurate metrology, and powerful automation, it provides direct metrology feedback for fab process control.

Download Accuros FIB-SEM datasheet

Service and support for your Accuros FIB-SEM

Supporting your work with innovative services and expert service teams

Our services blend a unique combination of people, tools, and technology designed to help you realize the full potential of your Accuros FIB-SEM instrument. Leveraging data and remote technologies allows us to expand our service reach, deliver an accelerated response, and optimize your system’s uptime and performance. We partner with you from pre-installation through the entire life of your instrument to help ensure you reach your goals effectively.

Improve predictable service events with remote system monitoring
Increase user efficiency with lamella preparation and workflow training
Improve system utilization with quarterly reviews
Consistent system maintenance with preventative and corrective services
Fast on-site response time

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Site Services for your Accuros FIB-SEM instrument

Your electron microscopy (EM) system is engineered for unmatched resolution and reliability—but its performance depends on more than its advanced technology and software. Environmental factors like electromagnetic interference (EMI), vibrations, acoustics, temperature, and humidity can all cause deviations from system specifications and impact the quality of your data.

Our Site Services team can partner with you to ensure you get the most out of your EM investment, from selecting the right physical placement to maintaining optimal site conditions.