Automate FIB-SEM workflows using smart software solutions and advanced accessories

Thermo Scientific AutoTEM Software helps automate in situ and ex situ TEM lamella preparation, supporting multi-site, unattended workflows that improve consistency and throughput in electron microscopy labs. Together with Thermo Scientific AutoScript Software for DualBeam™, MultiChem™ Gas Injection System, EasyLift™ Nanomanipulator, and Avizo™ Software, this integrated portfolio enables advanced sample preparation, precise material modification, and high-quality 3D data analysis. From automated scripting and gas-assisted processing to reliable sample transfer and AI-driven visualization, these solutions help streamline TEM, APT, and materials science workflows while supporting reproducible, high-quality results across a wide range of applications.

Software solutions

Auto Cross Section Software

Thermo Scientific Auto Cross Section (AXS) Software streamlines cross-section preparation and SEM imaging through intelligent automation. Designed for Thermo Scientific focused ion beam scanning electron microscopes (FIB-SEMs), AXS Software enables high-throughput, multi-site, multi-smaple cross-sectioning and imaging with exceptional precision and reproducibility. By automating FIB milling and SEM imaging workflows, AXS Software reveals subsurface features that are otherwise inaccessible—such as layer structures, interfaces, defects, and inclusions—providing critical insights into material composition, structural integrity, and failure mechanisms.

AutoTEM Software

Thermo Scientific AutoTEM Software automates in situ and ex situ TEM lamella preparation, enabling multi-site, unattended operation. It reduces preparation time and ensures consistent quality across samples.

Auto Slice & View Software

Thermo Scientific Auto Slice & View Software acquires high-fidelity 3D datasets through automated sequential milling followed by SEM imaging or EDS/EBSD mapping. It can help you reveal hidden defects or reconstruct complex microstructures.

AutoScript Software for DualBeam

Python-based scripting solution allows the creation of custom automation for faster, more accurate, and unattended operation. It supports various tasks such as imaging, patterning, and data analysis, enhancing reproducibility and efficiency in scientific workflows.

Avizo Software

Avizo Software empowers scientists with advanced visualization and image processing tools, enabling them to reconstruct stacks of slices into 3D volumes, segment and measure features of interest using both AI-driven and traditional methods, and register imaging and spectroscopy data for integrated, multi-channel visualization.

Accessories

MultiChem Gas Injection System

The Thermo Scientific MultiChem Gas Injection System is an advanced gas delivery solution that allows you to configure up to six different chemistries in one instrument. It provides in situ deposition and etching capabilities. Essential for protective coating deposition, circuit edits, and enhanced material removal.

EasyLift Nanomanipulator

The Thermo Scientific EasyLift Nanomanipulator precisely and reliably transfers micro- and nano-scale samples in situ. It streamlines lift-out workflows for TEM, APT sample preparation, and other analyses.

For Research Use Only. Not for use in diagnostic procedures.