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Automated TEM metrology with the Metrios 6S (S)TEM
The Thermo Scientific Metrios 6S (S)TEM enables automated TEM metrology utilizing automated TEM grid handling and seamless data connectivity between systems within the Thermo Scientific Vulcan Automated Lab. Leveraging our expertise in these areas, the Metrios 6S (S)TEM is designed to address the distinct challenges encountered in scaling lab operations.
Fully automated semiconductor metrology
The Metrios 6S (S)TEM is a new-generation, fully automated instrument that enables high-volume TEM metrology. The Metrios 6S (S)TEM features newly designed hardware and machine-learning-based capabilities. As part of the Vulcan Automated Lab, SEMI standard compliant TEM grid handling and host connection are seamlessly integrated, allowing automated TEM grid transfer from the Thermo Scientific Helios 6 HXS FIB-SEM and continuous dataconnectivity with a customer-provided host network. Along with Smart Automation software, this combination provides improved TEM metrology productivity and recipe-free automation for scalable lab operations and resource optimization.
Automated TEM grid handling
The new Metrios EFEM (Equipment Front End Module) is an innovative TEM grid handling system designed for the Metrios 6S (S)TEM as part of the Vulcan Automated Lab. It provides an automated, operator-free solution for high-throughput loading and unloading of TEM grids, seamlessly integrating with automated materials handling systems (AMHS) via overhead tracks (OHT) or autonomous mobile robots (AMR). In this workflow, samples are delivered to the Helios 6 HXS (S)TEM for creation of lamellas, which are then transferred to the Metrios 6S (S)TEM for high-precision metrology data collection.
Automated TEM grid handling workflow
Automated data connectivity for TEM metrology
Automated data connectivity facilitates seamless SEMI standard communication between a customer-provided Hostnetwork and the Metrios 6S (S)TEM’s workflow control software, including interfacing with the customer's materialhandling system.
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Automated TEM imaging and metrology
The Metrios 6S (S)TEM offers sophisticated, automated metrology, delivering precise nanoscale measurements through automated image acquisition and analysis, essential for semiconductor manufacturing. Its Smart Automation software significantly reduces set-up time for new processes and sample types, ensuring ease of use and scalability by leveraging advanced machine-learning algorithms. The instrument’s flexibility allows operation in both full-auto and semi-auto modes, adapting to specific lab needs and accommodating a wide range of challenging semiconductor device types. For model training, a new web-based segmenter and object detection algorithm accelerate the time to build robust Al models. For additional flexibility, conventional recipe-based automation is also available.
Metrios 6S (S)TEM technical highlights
TEM grid handling |
SEMI standard-compliant, operator-free grid handling via AMHS. |
Data connectivity |
SEMI standard-compliant software interface for connection to a customer-provided host network. |
Metrology |
TEM and STEM mode metrology accuracy: Less than 0.75% combined error in distortion and magnification calibration. |
Application software |
Smart Automation software allows setup of new automation routines in <4 hours for select workflows. EDS quantification using Thermo Scientific Velox Software, featuring dynamic correction of holder shadowing as a function of tilt. |
EDS |
Ultra-X detector provides high-sensitivity, windowless EDS detection with high solid angle and high cleanliness. |
Electron column |
Three-lens condenser system with indicators for convergence angle and size of the illuminated area, allowing for quantitative measurement of electron dose and illumination conditions. The S-CORR probe corrector provides sub-Ångström imaging resolution at 60 kV as specification and an order of magnitude improvement in optical stability. The S-CORR corrector simultaneously corrects A5 for all accelerating voltages. Flexible, high-tension range of 60–200 kV. Choice of ultra-stable, high-brightness Schottky field emission gun (X-FEG) or ultra-high- brightness cold field emission gun (X-CFEG) with an energy resolution of <0.4 eV. |
Stage |
Five-axis, piezo-driven Smart Stage with minimum XYZ step size of ≤20 pm. |
Holder |
High-accuracy, double-tilt holder designed for the Smart Stage. Alpha-tilt, under-goniometer software control; Alpha tilt range ±40 degrees for high- accuracy, double-tilt holder. |
Perform Instrument Service and Support Program from Thermo Fisher Scientific
Thermo Scientific Perform Services will empower your success for the lifetime of your system. Simplify your budget and maximize availability with the extraordinary value and predictable cost of ownership provided by Thermo Fisher Scientific.
- Gain access to technical support and factory expertise with telephone support and RAPID remote diagnostics
- Keep systems in peak condition with the latest software updates, including licenses and installation
- Get Thermo Scientific quality parts expedited to your site from strategic global inventories
- Ensure a rapid response with priority access to Thermo Fisher Scientific engineers
- Experience optimized system function with regular preventive maintenance
Most of the Thermo Scientific Perform Service packages offer software updates and continuous access to Thermo Scientific RAPID remote service and telephone support, ensuring that our technical experts' assistance is always at your disposal. Options for consumables coverage, extended service hours, and targeted uptime can provide additional business-critical support.
Remote service for Thermo Scientific instruments
At Thermo Fisher Scientific, our digital capabilities allow us to be more agile and proactive in how we support your instrument. Leveraging data and remote technologies enables us to expand our service reach, deliver an accelerated response, and optimize your system’s uptime and performance.
Our worldwide team of 1,000 service professionals is ready to assist you with technical issues or other service inquiries. Their goal is to expediently resolve any issue that might arise with your instrument.
Frequently asked questions
The Thermo Scientific Metrios 6S (S)TEM is designed for semiconductor manufacturers and metrology laboratories that require high-throughput, high-precision TEM measurements for advanced logic and memory devices. It is particularly well suited for organizations looking to scale laboratory operations while improving productivity, traceability, and data consistency.
The Thermo Scientific Metrios 6S (S)TEM automates many traditionally manual tasks, including sample handling, image acquisition, feature recognition, and metrology analysis. Automated grid handling, Smart Automation Software, a redesigned Smart Stage, and the Ultra-X EDS Detector help reduce operator workload while increasing throughput.
The Thermo Scientific Metrios 6S (S)TEM builds on the Metrios 6 (S)TEM platform by adding automated TEM grid handling, enhanced physical and digital connectivity, and integration with the Thermo Scientific Vulcan Automated Lab Workflow. These additions enable operator-free sample transfer, automated factory communication, and continuous workflow connectivity while maintaining the automated imaging and metrology capabilities of the Metrios 6 system.
The Metrios Equipment Front End Module (EFEM) automatically loads, unloads, and transfers TEM lamella carriers without operator intervention. This allows the Thermo Scientific Metrios 6S (S)TEM to integrate with automated material handling systems, including overhead track and autonomous mobile robot systems, which helps improve throughput and reduces the potential for human error. Optional in-flow plasma cleaning can also be performed automatically as part of the EFEM.
The Thermo Scientific Metrios 6S (S)TEM supports integrated communication between the microscope, workflow software, and your host network. This continuous data connectivity helps improve sample traceability, automate workflow coordination, and reduce manual data entry throughout the metrology process.
Machine learning is used to automate image acquisition, feature identification, and metrology workflows for the Thermo Scientific Metrios 6S (S)TEM. Smart Automation Software reduces setup time for new processes and sample types, while web-based segmentation and object detection can be used to accelerate AI model training. Conventional recipe-based automation is also available for customers who prefer established workflows.
The Thermo Scientific Metrios 6S (S)TEM supports advanced TEM and STEM imaging with multiple detector options, including standard HAADF and segmented BF/ADF detectors. The Ultra-X EDS Detector enables high-sensitivity energy-dispersive X-ray spectroscopy for elemental analysis, while integrated differential phase contrast (iDPC) imaging improves contrast for light elements and supports both magnetic and electric field imaging.
The Thermo Scientific Metrios 6S (S)TEM is designed for unattended, high-throughput operation. Automated sample handling and alignments, Smart Automation Software, equipment monitoring, and workflow connectivity all support reduced manual intervention while maintaining consistent data quality.
Organizations evaluating the Thermo Scientific Metrios 6S (S)TEM should consider how much automation they require, whether they plan to integrate with existing factory automation and host networks, their anticipated sample throughput, and the imaging and analytical capabilities needed for future semiconductor technology nodes. Contact our sales team to review installation requirements and determine the best configuration for your specific manufacturing needs.
For Research Use Only. Not for use in diagnostic procedures.