Extreme nanoscale precision for imaging and TEM sample preparation

The Thermo Scientific Helios 5 DualBeam is the flagship product in the Ga DualBeam portfolio, offering excellent precision for a broad range of applications. It supports sub-nanometer SEM and STEM imaging alongside ultra-thin, site-specific TEM lamella preparation. With advanced automation, including Thermo Scientific AutoTEM Software and intelligent beam tuning, the Helios 5 DualBeam helps ensure consistently high-quality results, even in complex workflows. Designed for advanced research in materials science and semiconductor characterization and failure analysis, it enables 2D and 3D materials characterization, sample preparation, nanoscale prototyping, and advanced device development with maximum confidence and reproducibility.

Helios 5 DualBeam features

Reveal very fine details

Sub-nm SEM and STEM imaging for remarkable analyses at the nanoscale.

Ultimate TEM sample preparation

Site-specific, ultra-thin lamella preparation for most challenging materials.

Power of full automation

Advancing the standard in TEM sample preparation.

Precise 3D characterization

Flexible workflow across a range of materials and devices.

Essential workflow component

Supports inert gas transfer and working at cryo conditions.

Work smarter every day

Streamlines targeted workflows, keeps your tool in top shape, and enables on the fly image adjustments for optimal results.

For Research Use Only. Not for use in diagnostic procedures.