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Introduction to FIB-SEM techniques
Our Thermo Scientific DualBeam FIB-SEM systems empower a variety of advanced techniques that enable researchers to prepare samples and gather data. This page highlights the core techniques and workflows facilitated by our instruments, explaining what they are and why they matter for your research. Whether your goal is to create an ultra-thin TEM lamella or to reconstruct a 3D volume of your sample’s interior, our FIB-SEM solutions offer the tools and automation to accomplish this efficiently.
Techniques
| (S)TEM sample preparation | Ideal for atomic-resolution TEM/STEM prep. Tightly focused beam of Ga ions enables ultimate FIB resolution, allowing preparation of ultra-thin, site-specific lamellae. Automating the entire workflow with Thermo Scientific AutoTEM Software reduces operator time and ensures consistency of results. |
| 3D structural analysis | Excellent for nanoscale 3D tomography and defect segmentation and visualization. In combination with Thermo Scientific Auto Slice & View Software, the Helios 5 DualBeam allows you to image and then reconstruct the smallest features in 3D with Thermo Scientific Avizo Software. |
| Cross-sectioning (2D) | Optimal for preparing cross-sections with high throughput. For this basic use case for FIB-SEM, the Helios 5 DualBeam executes with high precision and throughput. Even larger cross-sections can be prepared with PFIB instruments. |
| Nanoprototyping and nanofabrication | Ideal for nanopatterning and circuit edits. Sub-10 nm resolution with advanced automation makes it a strong choice for certain prototyping and device modifications. |
| Cryo workflow | Excellent for beam-sensitive and frozen samples. Configuration with a cryo stage and Thermo Scientific EasyLift NanoManipulator enables high-quality analysis of biological tissues, polymers, and frozen electrolytes. |
| Volume EM acquisition | Delivers essential volume EM capability for resin-embedded biological samples. The Helios 5 DualBeam supports precise FIB-SEM volumetric imaging and high-quality imaging of serial sections with Array Tomography in Thermo Scientific Maps Software. |
| APT tip preparation | Ideal for sharp APT tips. Allows site-specific extraction and precise final polishing with low kV to minimize damage. |
For Research Use Only. Not for use in diagnostic procedures.